Ceramic Robot Arm for Semiconductor

Semiconductor Equipment — Ceramic Robot Arm

Ceramic robot arms, also known as end effectors, ceramic manipulators, etc., mainly play the role of transportation and handling in semiconductor equipment. It is used as the hand of a robot to transport silicon wafers to designated positions, and its surface is in direct contact with the wafer. Because the wafer is extremely susceptible to contamination by other substances, it is generally carried out in a vacuum environment. In this environment, it is generally difficult for the robotic arm of most materials to complete the work. The materials used to make the robotic arm need to be resistant to high temperatures, wear-resistant, and have high hardness.

Alumina ceramics can just meet these conditions. Alumina ceramics have the physical properties of compactness, high hardness, and high wear resistance, as well as good heat resistance and excellent mechanical strength. They still have physical properties such as good insulation and good corrosion resistance in high temperature environments. It is an excellent material for making robotic arms of semiconductor equipment.

Due to the requirements of working conditions, ceramic robot arms are generally made of extremely high-purity alumina ceramic materials (mostly 99% alumina), and their accuracy and surface roughness need to be guaranteed.

Application fields: 1. Semiconductor equipment 2. Mechanical automation

Product Details

The following are examples of some styles, welcome to consult.

Customized Service Process

Jinghui has passed the ISO9001 quality management system certification and has 15 years of experience in precision ceramic processing. We can customize ceramic robot arms according to your drawings or samples, and provide you with high-quality services at any time.